Machine vision for defect detection and recognition has evolved from classical image‐processing workflows—such as thresholding, edge detection and template matching—to sophisticated deep learning ...

This review examines how microscopy and computational analysis can identify defects in self-assembled nanosphere structures ...

Detecting sub-5nm defects creates huge challenges for chipmakers, challenges that have a direct impact on yield, reliability, and profitability. In addition to being smaller and harder to detect, ...